精密工学会学術講演会講演論文集
2003年度精密工学会春季大会
セッションID: N32
会議情報

精密・超精密位置決め(1)
The Study on the Effect of Environmental Temperature Change on the Accuracy of Ultra-Precision Displacement Sensors
*Feng BoOtsuka Jiro
著者情報
会議録・要旨集 フリー

詳細
抄録
The practical resolution and the accuracy of the measurements of ultra-precision displacement sensors vary with the environmental conditions such as noise, temperature, wind, air pressure and even the humidity. Here we made some experiments on the effect of the environmental temperature giving the accuracy of ultra-precision displacement sensors. In order to find what causes these phenomena, we selected some kinds of displacement sensors and use the green room to make our experiments. After the analysis of the data, it is known that the temperature gives the effect on the measure system especially on the displacement sensors. And it is clear that the changes of different sensors caused by the temperature are very different.
著者関連情報
© 2003 公益社団法人 精密工学会
前の記事 次の記事
feedback
Top