抄録
A new method is developed for Coordinate Measuring Machine (CMM) verification which uses a temporal-coherence (pulsed) interferometer technique. The repetition frequency of optical frequency comb which is traceable to the primary frequency standard (SI Unit). The repetition frequency of 100 MHz of a general optical frequency comb is transferred to several GHz by a Fabry-Pérot Etalon. Subsequently, a pulsed interferometer with a rough ball target is developed. The pulse interference fringes are generated at each several tens centimeters and then compact absolute position-measuring system is realized for practical non-contact use with a high accuracy measurement. The measurement system is compared with the existing incremental laser interferometer. The drifts of both systems are the same tendency. The maximum drift difference between two interferometric systems is about 0.1 μm. The average standard deviation of distance/length measurement is about 0.6 μm for the lengths up to 1.5 m. This new technique can provide a high accuracy for verification of the conventional CMM.
