精密工学会学術講演会講演論文集
2014 JSPE Spring Conference
セッションID: J74
会議情報

Measurement Accuracy Improvement Based on the FDK Effect for CT Dimensional Metrology
*薛 林鈴木 宏正
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抄録
Recently, due to the capability of providing the internal and external geometric information of workpiece simultaneously, X-ray computed tomography (CT) entered the application field of dimensional metrology in industry. However, in this new field the CT technology cannot meet the high accuracy requirements due to many factors. As the cone beam reconstruction algorithm FDK has a severe effect on the CT measurement, this paper proposes a method to analyze the FDK (Feldkamp-Davis-Kress) effect independently form other factors by using the numerical phantoms of a sphere and a cylinder. After the feature and cause of the error are discussed, the method of measurement accuracy improvement is given.
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© 2014 The Japan Society for Precision Engineering
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