抄録
Flatness is a critically important element in development of precision-tolerance capabilities. Because flat surface acts as reference surface for the inspection other workpieces. In this study, we describe a new technique using multi-beam angle sensor to measure flatness of the mirror. The flatness measuring machine (FMM) uses only one sensor and is less susceptible to instrumental errors, severe conditions of stress, temperature and in hostile environments. The ability quickly and accurately to measure flatness on the shop floor as well as in the inspection department gives us a distinct advantage over other techniques. The experimental results demonstrating the feasibility of the MBAS for flatness measurement are also presented.
