精密工学会学術講演会講演論文集
2017 JSPE Spring Conference
セッションID: D39
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In-process measurement of evanecent wave based nano-stereolithography using critical angle shift
*孔 徳卿道畑 正岐高増 潔高橋 哲
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A measurement method that utilizes the critical angle shift caused by variation of resins' refractive index after polymerization has been proposed to meet the strong demand for in-process measurement on evanescent wave based nano-stereolithography. By using this measurement method, the shape of cured resins can be directly observed from the bottom of the substrate during fabrication process by detecting the reflectivity at the subcritical angle. After theoretically proving the possibility of this method, we have experimentally confirmed its feasibility by monitoring the cured resins that were still being submerged in the liquid resin.
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© 2017 The Japan Society for Precision Engineering
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