Study of process parameters in sub-aperture non-Newtonian fluid based contactless polishing

抄録

Non-Newtonian fluid based contactless polishing has the potential to prevent scratch and damage on finished surfaces. However, the relationship between the process parameters and material removal rate has not yet been clarified for sub-aperture tools. By combining experimental and simulation results, a model of the removal rate variation as function of fluid flow conditions is proposed and the coefficients are determined in the case of corn starch and polymer mixtures. Process conditions to achieve optimal removal rate are also clarified from the experimental data.