高温センシングシステムの研究

—CMOS半導体素子の高温特性—

抄録

I proposed a high temperature sensing system with small thermal insulating chamber using the evaporation heat of water. For this system all electronic devices must be operated at 100 degrees Celsius. High temperature characteristics of CMOS logic IC were measured. CMOS IC can be operated continuously at 100 degrees Celsius and may be operated at more high temperature.