研究論文
カソード分極微小電極近傍の局所アルカリ性化を用いたAl薄膜へのマスクレス溶解パターニング
2004 年 55 巻 12 号 p. 929
詳細
2004 年 55 巻 12 号 p. 929
Dissolution patterning of thin sputter-deposited Al film formed on glass plate was examined by bringing a cathodically polarized small electrode near it. Hydrogen gas evolution on the small electrode causes enough alkalization of electrolyte solution around the electrode to dissolve Al film due to its amphoteric nature. A dissolution pattern less than 1mm in size with a dissolution width of ca. 0.1mm was obtained using a cathodically polarized thin Cu wire electrode brought near to the Al film surface and scanned along the surface.
