Niobium specimens with chemical polishing were anodized in a phosphoric acid solution galvanostatically at i
a,ini=1, 10, 100 and 1000Am
−2 up to E
a=100V, and then potentiostatically at E
a=100V for t
pa=7.2ks. During galvanostatic anodizing, the anode potential increased almost linearly with time on all the specimens, while, during potentiostatic anodizing, the anodic current decreased with time. The current density at t
pa=7.2ks was higher at lower i
a,ini in the range of 0.02 to 0.25Am
−2. The spectra of Rutherford backscattering spectroscopy (RBS) and glow discharge optical emission spectroscopy (GD-OES) showed that higher i
a,ini causes film thickness to decrease and the amount of incorporated phosphorus to increase. Micro imperfections were formed in the film at the ridge of the convex network structure produced by chemical polishing, and the number of imperfections decreased with increasing i
a,ini. Parallel equivalent capacitance, C
p, and the dielectric dissipation factor, tan δ, of anodic oxide films decreased with increasing i
a,ini. The mechanism of decrease in the number of imperfections in anodic oxide with increasing i
a,ini is discussed in term of film thickness, phosphorus incorporation and Nb
5+ transport number.
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