IEICE Transactions on Electronics
Online ISSN : 1745-1353
Print ISSN : 0916-8524
Special Section on Distinguished Papers in Photonics
Si-Photonics-Based Layer-to-Layer Coupler Toward 3D Optical Interconnection
Nobuhiko NISHIYAMAJoonHyun KANGYuki KUNOKazuto ITOHYuki ATSUMITomohiro AMEMIYAShigehisa ARAI
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2018 Volume E101.C Issue 7 Pages 501-508


To realize three-dimensional (3D) optical interconnection on large-scale integration (LSI) circuits, layer-to-layer couplers based on Si-photonics platform were reviewed. In terms of optical cross talk, more than 1 µm layer distance is required for 3D interconnection. To meet this requirement for the layer-to-layer optical coupler, we proposed two types of couplers: a pair of grating couplers with metal mirrors for multi-layer distance coupling and taper-type directional couplers for neighboring layer distance coupling. Both structures produced a high coupling efficiency with relatively compact (∼100 µm) device sizes with a complementary metal oxide semiconductor (CMOS) compatible fabrication process.

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© 2018 The Institute of Electronics, Information and Communication Engineers
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