Development and Evaluation of Superconducting Nanowire Single-Photon Detectors for 900-1100 nm Photon Detection

抄録

Superconducting nanowire single-photon detectors(SSPDs or SNSPDs) can detect single photons in a wide spectrum range from ultraviolet to mid-infrared wavelengths. We developed SSPDs for the light wavelength of 900-1100 nm, where it is difficult to achieve high detection efficiency by either Si or InGaAs avalanche photodiodes. We designed and fabricated the SSPD with non-periodic dielectric multilayers (DMLs) composed of SiO₂ and TiO₂ to enhance the optical absorptance in the wavelength range of 900-1100 nm. We measured the detection efficiency (DE) in the wavelength range of 800-1360 nm using a supercontinuum light source and found that the wavelength dependence of DE was in good agreement with the simulated spectrum of the optical absorptance of the nanowire device on the designed DML. The highest system DE was 81.0% for the wavelength of 980 nm.