2018 Volume 61 Issue 12 Pages 778-783
Microstructures of materials and devices greatly influence the mechanical, electrical, magnetic, and other properties. In order to improve such properties, it is very important to understand the relationship between the microstructure and the properties. Atom probe tomography is a technique which can identify the position of individual atoms and can display the results as 3D tomography. Also, the atomic species are identified based on the time-of-flight measurement. Therefore, all the elements from hydrogen can be analyzed. Although there are several theoretical limitations of this method, the application area is spreading by complementing with other methods such as SEM, TEM and so on. In this paper, the principle and the limitations of the laser assisted atom probe tomography, efforts to improve performance, influence of measuring conditions such as laser wavelength and intensity, and examples of typical application are shown.