Pyroelectric properties of
c-axis oriented thin films with the compositions of [(1-
x)PbTiO
3+
xMgO], where
x=0.015-0.090 prepared by rf-magnetron sputtering method were investigated. With increasing Mg content and film thickness, the relative dielectric constant, ε
r, increased and the dielectric loss, tan δ, decreased. And, the effects of film thickness on them were also seen. Results of measurement for the pyroelectric coefficient,
P, showed that the direction of natural polarization is in the upward direction perpendicular to [100]-oriented Pt thin film on (100) MgO single crystal substrate. The Curie point,
Tc, lowered linearly with increasing Mg content. The lowering rate was approximately 11.8°C/mol% (MgO), which gave good agreement with that of [(1-
x)PbTiO
3+
xMgO] [PMT] single crystals. It was found that these films have large
P independent of temperature in the range from room temperature to about 300°C after heating and cooling process beyond
Tc. The figure of merit, F. M., and F. M. D* on
x=0.045 PMT thin film of 2μm thickness exhibited the highest values, reaching 1.5×10
-10Ccm/J and 2.1×10
-8Ccm/J, respectively. The above-mentioned values were about 2.5 and 2.6 times larger than those of the PMT single crystals, respectively. The values were about 1.5 times larger than those of Pb
1-xLa
xTi
1-x/4O
3 [PLT] thin films.
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