Mo
5Si
3 reinforced silicon nitride composite was fabricated by sintering a Mo-solution infiltrated porous silicon nitride at 1850°C in N
2 atmosphere; silicon nitride containing solid lubricant particles of MoO
3 at the surface layer was developed by oxidizing a Mo
5Si
3-Si
3N
4 composite at 700°C in air. The mechanical properties and the tribology behavior of Mo
5Si
3-Si
3N
4 composite were evaluated. It was found that the Mo
5Si
3 dispersed at grain boundary of silicon nitride, the average diameters of Mo
5Si
3 particles being in the range 0.2 to 0.6μm. The flexural strength of the Mo
5Si
3-Si
3N
4 composite was 881MPa, which was higher than that of unreinforced silicon nitride by about 20%, because of the Mo
5Si
3 sub-micron particles reinforced the grain boundaries of silicon nitride. The friction coefficient of silicon nitride depended on the stress conditions and the shape of the pin. When increasing the spherical radius of the pin from 5 to 18mm, the friction coefficient of the Mo
5Si
3-Si
3N
4 composite decreased and the wear mechanism shifted from adhesive-abrasive wear to a complex type of adhesive-abrasive and abrasive wear mechanism. The formation of MoO
3 on the surface layer of Mo
5Si
3-Si
3N
4 after oxidation treatment lowered the friction coefficient, the friction coefficient of oxidized Mo
5Si
3-Si
3N
4 composite being 0.46 in the dry friction condition. Due to the self-lubricant effect of MoO
3, the friction coefficient of oxidized Mo
5Si
3-Si
3N
4 composite was lower than that of conventional silicon nitride by about 25%.
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