【表面と真空 (Vacuum and Surface Science)】は，2018年4月の日本表面科学会と日本真空学会の合併により設立された公益社団法人 日本表面真空学会が出版する学術論文誌です。設立に先立つ2018年1月に創刊された新しいジャーナルになります。前身誌は日本真空学会の【Journal of the Vacuum Society of Japan】と日本表面科学会の【表面科学】になり，双方の記事種を踏襲し，その上で新たな分野への展開を目指しています。巻号は，歴史のより長い【Journal of the Vacuum Society of Japan】の巻数を引き継ぎ，第61巻からの創刊となります。
Semiconductor devices with complicated structures have been developed, and it is becoming increasingly important to understand three-dimensional (3D) structures of devices with nanometer resolution. The key to successful nanometer-scale 3D analysis is sample preparation technology and it has been highly developed. By combining or correlating multiple physical analyses, limitations of single analysis method are well covered and new information of 3D devices is obtained. Simultaneously acquired multi-signal STEM images are effective for internal structure analysis of 3D devices.
We present an overview of recent studies on the moiré superlattices in Van der Waals atomic layer materials. We first introduce typical moiré superlattices such as twisted bilayer graphene and graphene h-BN superlattice. We also argue about the Hofstadter fractal energy spectrum in magnetic fields, the strain effect and domain formation, and the graphene quasicrystals.
Frequency modulation atomic force microscopy (FM-AFM) can simultaneously detect the conservative and non-conservative force interactions between a tip and a sample, based on the resonance frequency shift (Δf) and the mechanical energy dissipation of an oscillating cantilever, respectively. Here, we outline the energy dissipation measured by FM-AFM and introduce our recent results obtained through measurement of the energy dissipation. First, surface resistances can be evaluated in non-contact using the proportional relationship between the energy dissipation due to Joule heat and Δf due to the electrostatic attractive force. Second, Si adatoms on a Si(111)-(7×7) surface, which are observed to be static by FM-AFM, can move back and force between their stable sites and their neighboring quasi-stable sites, detected by measuring of the energy dissipation.