電気学会論文誌E(センサ・マイクロマシン部門誌)
Online ISSN : 1347-5525
Print ISSN : 1341-8939
ISSN-L : 1341-8939
特集論文
3次元マイクロスプリングを用いた高次回折モード型静電駆動プラズモニック素子
西山 宏昭齋藤 泰登
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2016 年 136 巻 6 号 p. 261-265

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Electrostatically tunable plasmonic devices were fabricated on multi-photon polymerized three-dimensional microsprings. The tunable device was comprised of a plasmonic microplate, two microsprings and a support part. Surface plasmonic modes were excited using high order diffraction on the Au gratings of the devices. Such diffraction allowed for plasmon propagation even on microscale metallic structures. The plasmon excitation efficiencies could be continuously modulated from almost zero to maximum by inclining the microplates with the application of DC voltage up to 40 V. Dynamic functionality offers opportunities for further integration of other optoelectronic components and tunable metamaterials.
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