抄録
We have developed a highly integrated liquid-crystal-on-silicon display for three-panel color projector. The silicon panel was designed and fabricated by a custom 0.5 μm 3-metal CMOS technology with a spatial resolution of 1024 x 768 pixels. The pixel pitch was 13.8 μm and the fill factor was 91%. 6-bit digital data drivers and gamma-correction resistor network were integrated within the silicon panel for true gray scale and full color image representation. The display was made with an optimized mixed twisted nematic and birefrigence cell configuration for high contrast ratio at CMOS compatible voltage. Contrast ratio was 70:1 at 3.5Vrms. With a compact optical projector, vivid image and good color saturation were demonstrated.
