精密工学会学術講演会講演論文集
2011年度精密工学会春季大会
セッションID: K04
会議情報

大型非球面形状のナノメートル測定(第4報)
走査法を用いた凹面ミラーの数値計算と実験
XIAO MUZHENG*重城 聡美高橋 哲高増 潔
著者情報
会議録・要旨集 フリー

詳細
抄録
High accuracy mirrors and lenses with large dimension are widely used in the huge telescopes and other industry filed. However, commercial profile measuring machines faces problems when measuring aspheric surface with large slope. We have proposed a new method to measure large aspheric optical surface with scanning deflectometry method and rotatable optical devices in last report. In this report, error parameters by the rotation of rotatable mirror are considered into the error analysis. Numerical simulation is done to verify the theoretical error analysis. And experiment is done to measure a large spherical surface with a diameter of 200 mm.
著者関連情報
© 2011 公益社団法人 精密工学会
前の記事 次の記事
feedback
Top