In optical electronics systems, particular optical devices such as mirrors, lenses, diffraction grating, etc. play respective roles. Therefore, many optical devices are combined to consist of a optical system. This causes the problem that the arrangement error of these devices influences the total accuracy of optical system. In addition, new optical devices with multi-function, e.g. diffraction and focusing, have been recently required to miniaturize optical systems and to decrease cost. However, their shape is generally very complicated. Typical example is such a shape as curved microgrooves on a 3-dimensional complex surface. To machine the shape, milling or turning by use of a rotational cutting tool is not suitable for tool interference. In the study, a non-rotational cutting tool is thus employed. In case of machining microgrooves on sculptured surface with a non-rotational cutting tool, 6-axis control is necessary to control tool attitude and tool direction. The study deals with the development of CAM system for 6-axis control ultraprecision grooving. From the experiments of creating microgrooves on a spherical surface and a sculptured surface, it is found that microgrooving on their surfaces is possible by 6-axis control.
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