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JOURNAL OF JAPANESE SOCIETY OF TRIBOLOGISTS
Online ISSN : 2189-9967
Print ISSN : 0915-1168
ISSN-L : 0915-1168
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Volume 69 (2024)
Issue 4 Pages 235-
Issue 3 Pages 161-
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Volume 68 (2023)
Issue 12 Pages 811-
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Volume 67 (2022)
Issue 12 Pages 813-
Issue 11 Pages 735-
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Volume 66 (2021)
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Issue 11 Pages 795-
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Issue 6 Pages 401-
Issue 5 Pages 327-
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Volume 65 (2020)
Issue 12 Pages 715-
Issue 11 Pages 645-
Issue 10 Pages 587-
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Issue 7 Pages 395-
Issue 6 Pages 327-
Issue 5 Pages 269-
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Volume 64 (2019)
Issue 12 Pages 703-
Issue 11 Pages 639-
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Volume 63 (2018)
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Volume 62 (2017)
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Volume 61 (2016)
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Volume 60 (2015)
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Volume 59 (2014)
Issue 12 Pages 735-
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Volume 58 (2013)
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Volume 59, Issue 12
Special Issue on State-of-the-Art Technology of Chemical Mechanical Polishing
Displaying 1-13 of 13 articles from this issue
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Announcement
Announcement
2014 Volume 59 Issue 12 Pages K12
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_K12
JOURNAL
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Contents
Contents
2014 Volume 59 Issue 12 Pages M12
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_M12
JOURNAL
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Serial
Messages to Tribologists
International Tribology Conference ITCTokyo2015
Shinya SASAKI
2014 Volume 59 Issue 12 Pages 735
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_735
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(541K)
Special Issue on State-of-the-Art Technology of Chemical Mechanical Polishing
Prologue to the Special Issue on “State-of-the-Art Technology of Chemical Mechanical Polishing”
Momoji KUBO
2014 Volume 59 Issue 12 Pages 736
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_736
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(524K)
Explanation
Advanced Control of Chemical and Mechanical Polishing by Nano-Scale Dispersion
Seiichi SUDA
2014 Volume 59 Issue 12 Pages 737-743
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_737
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(1394K)
Analysis of Chemical-Mechanical Polishing Mechanism of Glass with Cerium Oxide
―Consideration by FT-IR and XPS Measurement of Abrasive Grain―
Makoto SATO
2014 Volume 59 Issue 12 Pages 744-751
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_744
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(1578K)
Development of Highly-Efficient Loose Abrasive Polishing Technology Using AC Electric Field
Hiroshi IKEDA, Yoichi AKAGAMI
2014 Volume 59 Issue 12 Pages 752-758
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_752
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(1332K)
Development of Reducing Polishing Slurry Technique and Apparatus by Control of Slurry Flow under AC Electric Field
Daisaku MATSUSHITA
2014 Volume 59 Issue 12 Pages 759-764
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_759
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(1942K)
Polishing Performance and Mechanism for Copper Surface CMP Using Water-Soluble Fullerenol
Yasuhiro TAKAYA, Masaki MICHIHATA, Terutake HAYASHI
2015 Volume 59 Issue 12 Pages 765-772
Published: December 15, 2015
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_765
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Development of High Precision Polishing Method for Hard-to-Process Semiconductor Materials
Akihisa KUBOTA
2014 Volume 59 Issue 12 Pages 773-779
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_773
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Elucidation of Chemical Mechanical Polishing Mechanism for Hard-to-Process Materials by Quantum Chemical Molecular Dynamics Simulations
Kentaro KAWAGUCHI, Takehiro AIZAWA, Yuji HIGUCHI, Nobuki OZAWA, Momoji ...
2014 Volume 59 Issue 12 Pages 780-786
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_780
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Report of the Society
Report of the Society
2014 Volume 59 Issue 12 Pages 787-791
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_787
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Index to Volume 59
Index to Volume 59
2014 Volume 59 Issue 12 Pages M-59
Published: December 15, 2014
Released on J-STAGE: May 10, 2017
DOI
https://doi.org/10.18914/tribologist.59.12_M-59
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