Journal of The Japan Institute of Electronics Packaging
Online ISSN : 1884-121X
Print ISSN : 1343-9677
ISSN-L : 1343-9677
Tutorial Series – Basic MEMS ⑬
Microfabrication and Assembly Method for Microfluidics
Saki KondoYuichi Utsumi
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2009 Volume 12 Issue 2 Pages 163-165

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© 2009 The Japan Institute of Electronics Packaging
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