XYステージ精密制御のための初期値補償を考慮した繰り返し学習制御の提案

抄録

In recent years, with the development of the manufacturing industry, it has become essential to increase the speed and performance of various types of manufacturing equipment. Iterative control, in which specific operations are repeated, is considered effective in manufacturing equipment for mass-produced goods, and research has been conducted. However, repetitive control cannot guarantee sufficient accuracy immediately after the start of a trial, as the same operation is repeated to enable highly accurate tracking. Therefore, a control system was created that automatically learns initial values by memorizing the operation after the trial so that highly accurate tracking can be performed from the beginning the next time a similar operation is performed.