抄録
(Bi, La)3Ti4O12 (BLT) thin films were prepared by chemical solution deposition method. The films were grown on various size of Pt-coated Si (Pt/Ti/SiO2/Si(100)) substrates. The effect of substrate size for structural and electrical properties of BLT thin films was investigated. The drastic orientation changes were observed with the changing of substrate size. The films deposited on lager substrate were c-axis preferentially oriented. However, the film deposited on 1.0 × 1.0 cm substrate was randomly oriented.
