BaTi2O5 (BT2) films were prepared on Pt/Ti/SiO2/Si substrates by laser CVD using Ba(DPM)2 and Ti(OiPr)2(DPM)2 as precursors. The BT2 films in a single phase were obtained at laser power (PL) between 57 and 112 W, and the deposition temperatures (Tdep) between 908 and 1041 K. The films deposited at 75-79 W (Tdep = 959-970 K) showed the (020) preferred orientation. The (020)-oriented BT2 films consisted of columnar grains with a pyramidal facet, and the grain size increased with increasing PL.
