Precision flatness measurement by an optical multi-beam angle sensor (2nd Report)

Calibration of the sensor and cylindrical surface measurement

抄録

In this study, we show a new self-calibration method for calibrating autocollimator having nanometer accuracy is proposed, and the basic characteristics of the self-calibration are discussed. With the aid of the tilt-stage to ensure the motion move step by step, the multi-beam angle sensor was calibrated by the proposed method. Compared with the existing methods, the proposed model provides a feasible way to calibrate the sensor with better accuracy. Additionally, the results of calibration experiment and measurement of cylindrical surface are also presented in the paper.