It has been clearly shown that nano-sized electrostatic atomized water particles (NEAWPs) are effective in inactivating bacteria, viruses and fungi. In this study, we clarified the physicochemical properties of NEAWPs and performed experimental exposure of NEAWPs to fungal cells and spores in order to understand the inactivation mechanism against fungi. As a result, we confirmed that NEAWPs is nanosized aerosol with a peak diameter of about 15 nm and mainly contain OH radicals as reactive oxygen species. We also found that the inactivation of the fungus proceeded even after the exposure of NEAWPs was stopped. The observation by the electron microscopy revealed leakage of cytoplasmic contents that was thought to be caused by the damage of the cell wall. Therefore, we estimated that the reduction mechanisms of fungal viable cells were the destruction of cell wall by exposing NEAWPs and the consequent outflow of cytoplasmic contents.