Non-equilibrium plasmas are characterized by high electron temperatures (tens of thousands of degrees) and low gas temperatures (about room temperature), and thereby, are termed as low-temperature plasmas. High-energy electrons collide with gas atoms and molecules to produce ions, excited species, and reactive species to accelerate chemical reactions, which are used in a wide range of environmental, medical, and agricultural applications, such as sterilization, cancer treatment, and plant disease control. Furthermore, they are used in the applications for materials science involving thin film growth and nanomaterial synthesis. Additionally, high reactivity and controllability can be realized by physically controlling the behavior of electrons and ions by means of electric and magnetic fields. In this review, the methods for physically and chemically controlling plasmas are described, and applied research, utilizing controlled non-equilibrium plasmas, is introduced.
View full abstract