Thin films of molybdenum oxide were formed by subliming MoO
3 in vacuum on the cleavage face of molybdenite polished surfaces of metals at a temperature t and their strueture was investigated by the method of cathode-ray diffraction. It was found that the strueture depends upon the nature of the base and the temperature t as summarised in the following table. The substance denoted by [MoO
3] in the table is supposed to be an intermediate oxide between MoO
2 and MoO
3 The substance which produced the diffuse rings has not been identified. In the pattern of MoO
2 single crystal, extra spots were observed and they are interpreted as due to a superstructure of MoO
2 crystal
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