Abstract
We have developed a dedicated device for sealing characterization using the SCREAM method by which the pressure in a sealed micro-cavity can be measured. We also newly propose a method for estimating the air damping of resonators in the free-molecule regime. Although a great deal of research sealing has been carried out using resonators or diaphragms for the sealing characterization, there are problems such as an insufficient measurable pressure range. This paper shows that the necessary minimum measurable pressure is 0.1 Pa and a suitable sensing method for the characterization is a resonant type sensor using pressure dependence of the quality factor of a resonator. The sealing characterization device with a measurable pressure range of 0.1–103 Pa was successfully developed.
