Abstract
This paper discusses a capacitance probe that allows us to visualize wiring patterns on PCB without contacting the board directly.
We developed a positioning control mechanism that operates in three dimensions with 5 μm accuracy. Then, we used that system to move a capacitance probe precisely along the PCB surface.
We used the system to visualize wiring patterns using the capacitance change of the PCB surface. The system was able to make an image of 200 μm wide patterns in the non-contact condition. This shows the possibility of an inspection method that visualizes the wiring patterns on a PCB in a non-contact condition using a capacitance probe.
