Small-crystallite Ge-Fe-Ox films, of 0.6-1.0 μm thick, were made from Ge and Fe as the starting materials by vacuum evaporation under Po
2=10
-2 torr. Crystal phases and perpendicular magnetic anisotropy of these films were investigated. Two phases having small-crystallite irons and amorphous GeO
2⋅Fe
2O
3 coexisted in these films where GeO
2 contents (Ge/Ge+Fe) are in the region between 22 and 48 wt%. The films containing more than 48 wt% of GeO
2 content were characterized by amorphous structure. GeO
2 was inferior to P
2O
5 in the capability of making the iron oxide amorphous, because amorphous iron oxides were prepared by the addition of 16 wt% of P
2O
5. When Ge and Fe were evaporated under Po
2=10
-2 torr simultaneously, small-crystallite irons were accumulated in the films because of the incomplete reaction between GeO
2 and FeO
x on the glass substratre. The ferromagnetic properties of the films were originated in these small-crystallite irons. The perpendicular magnetic anisotropy films were prepared in the limited region from 22 to 32 wt% of GeO
2 content. The perpendicular magnetic anisotropy constant (Ku) was 2×10
4 erg/cm
3, that was less than those of BaFe
12O
19 film, CoFe
2O
4 film and amorphous GdFe alloy film. The perpendicular magnetic anisotropy seemed to be induced by the shape anisotropy of the columnar structure having small-crystallite irons.
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