This report describes micro-fabrication of polytetrafluoroethylene (PTFE) to make a micro-fluidic device. The micro-cutting process was employed for fabrication of required elemental micro-structures, such as micro-channels and micro-reservoirs, for the device. In general, burrs are generated easily in the cutting of soft materials, such as PTFE. It is important to determine how to prevent burr generation and how to clean the generated burrs to ensure device quality. To obtain fundamental information about burr generation in the micro-cutting of PTFE, through-hole drilling, groove milling, and face milling were performed. Elemental micro-structures without burrs were fabricated on PTFE plates. Furthermore, the plates were sealed with sealing film assisted by pressure. Testing leakage with fluid samples confirmed that the pressure-aided sealing was useful.
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