On laser beam scanning systems including a spherical mirror having oblique angles to the incident beam, the distortions of f-θ linearity and spot size have been analysed, being compared with the characteristics of the parabolic mirror which were published in papers.
It is shown that the distortions could be minimized to nearly zero under the condition that the optical path length between the deflector and the mirror is set to an optimum value.
In the case of a spherical mirror, the optimum conditions are approximately 0.50f (f is the focal length) for the f-θ linearity and approximately 0.80f for the circle of confusion, somewhat varying with the direction of radius of the circle as well as the oblique angle and the deflecting angle.
The laser spot size has been obtained from the calculated circles of confusion, considering the Gaussian laser beam propagation property, and compared with the experimental result.
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