JSAP Annual Meetings Extended Abstracts

The 80th JSAP Autumn Meeting 2019

Displaying 1801-1850 of 4165 articles from this issue

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Operation Characteristics of Plasma Cathode for Sheet Plasma Production Using Lanthanum Tungsten Hot Cathode

Yoshiyuki Matsui, Toshiro Kasuya, Motoi Wada

Session ID: 18a-PA6-8
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1801

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Measurement of ion energy distribution with Faraday cup in dual frequency capacitively-coupled plasma

Akihiro Mitsuya, Makoto Moriyama, Naoya Nakahara, Haruka Suzuki, Hirot ...

Session ID: 18a-PA6-9
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1802

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Emission of H^- Ions from C₁₂A₇ Electride Surface Immersed in Hydrogen Plasma

Motoi Wada, Takayuki Eguchi, Mamiko Sasao, Masashi Kisaki, Haruhisa Na ...

Session ID: 18a-PA6-10
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1803

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Molecular structure analysis on surface of glucose film using sum frequency generation spectroscopy

Yuta Yoshida, Ryoya Katsuya, Takayuki Ohta, Kenji Ishikawa, Masaru Hor ...

Session ID: 18a-PA6-11
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1804

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Measurement of ion flux and plasma density by tone burst floating probe method

Takeshi Katahira, Mikio Ohuchi, Shuichi Sato

Session ID: 18a-PA6-12
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1805

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Radial Dependence of Rotational Temperature of N₂ and N₂⁺ in Nitrogen Plasma

June Konami, Atsushi Nezu, Hiroshi Akatsuka

Session ID: 20a-B11-1
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1806

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The excited-state distribution analysis of the low-pressure microwave discharge argon plasma for electron energy distribution function diagnosis by optical emission spectroscopic measurement

Yuya Yamashita, Hiroshi Akatsuka

Session ID: 20a-B11-2
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1807

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Measurements of electron velocity distribution function of streamer discharges produced in the air using Thomson scattering

Kentarou Tomita, Kiichiro Uchino, Yuki Inada, Atsushi Komuro, Xiang Zh ...

Session ID: 20a-B11-3
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1808

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Electric field measurement in plasma by laser absorption spectroscopy at Balmer-alpha line of atomic hydrogen

Kosuke Takada, Syusuke Nishiyama, Koiti Sasaki

Session ID: 20a-B11-4
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1809

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Detection of OH radicals by evanescent-wave laser induced fluorescence in the vicinity of a quartz surface interaction with an atmospheric-pressure plasma

Yuto Hishida, Koichi Sasaki

Session ID: 20a-B11-5
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1810

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Pulse and power controls in modulated pulsed power magnetron sputtering and the optical emission spectroscopy

Yuki Nakagomi, Tatsuya Watabe, Mutsuki Hirayama, Ryosuke Kaneyuki, Nob ...

Session ID: 20a-B11-6
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1811

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Spatially resolved measurement of bremsstrahlung spectrum in a pure helium atmospheric pressure glow discharge

Motonao Nagasaki, Taiichi Shikama, Yohei Ueno, Masahiro Hasuo

Session ID: 20a-B11-7
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1812

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[Highlight] Time- and space-resolved observation of solvated electrons dynamics in femtosecond laser-induced plasma reaction field in liquid

Noritaka Sakakibara, Tsuyohito Ito, Kazuo Terashima, Yukiya Hakuta, Ei ...

Session ID: 20a-B11-8
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1813

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Vacuum Ultraviolet Absorption Spectroscopy of Hydrogen Plasma Using a Self-Absorbing Micro-Discharge Hollow Cathode Light Source

Sho Shimizu, Keigo Takeda, Takayoshi Tsutsumi, Mineo Hiramatsu, Masaru ...

Session ID: 20a-B11-9
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1814

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Density-Correlation between Metastables and Electrons in Low-Temperature Plasmas in Ar

Toshiaki Makabe

Session ID: 20a-B11-10
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1815

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Fundamental Physics for Plasma Technology

Uwe Reinhard Czarnetzki

Session ID: 20p-B11-1
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1816

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Time-resolved Measurement of Pulsed-microwave Excited Atmospheric-pressure Long-scale Slot Plasma

ManhHung Chu, Haruka Suzuki, Hirotaka Toyoda

Session ID: 20p-B11-2
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1817

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Measurement of negative ions using retarding field energy analyzer with magnetic filter

Yoshinobu Matsuda, Masaki Ishiba, Shu Yasumoto, Tomohiro Furusato, Tak ...

Session ID: 20p-B11-3
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1818

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Possibility of In-situ Measurements of Double Curling Probes for Material Processing

DAISUKE OGAWA, Keiji NAKAMURA, Hideo SUGAI

Session ID: 20p-B11-4
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1819

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Development and assesment of rotational maze shaped RF magnetron sputtering system for improving target utilization

Rei Tanaka, Yasunori Ohtsu, Takahiro Nakashima

Session ID: 20p-B11-5
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1820

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Production and optical emission spectroscopy ofradio frequency hollow cathode discharge plasmausing Ar/O₂ mixed gas for high-speed ashing of polyimide film

Shinnosuke Honda, Yasunori Ohtsu, Yuta Ino, Yuto Fukunaga

Session ID: 20p-B11-6
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1821

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Development of RF magnetron sputtering source for synthesis of water repellent thin film on the next-generation vehicle window

Yuta Ino, Yasunori Ohtsu, Koya Yasuda

Session ID: 20p-B11-7
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1822

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Temporal change in surface tension at gas-liquid interface induced by spatial afterglow of an atmospheric-pressure plasma

Takuma Kaneko, Shirai Naoki, Sasaki Koichi

Session ID: 20p-B11-8
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1823

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Simulation of Plasma Generation by Resonant-Cavity Microwave Discharge

LIZHU TONG

Session ID: 20p-B11-9
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1824

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Time Evolution of Discharge Profiles and Spatial Distribution of Hydrogen Radical Density in the Nonequilibrium Atmospheric Pressure Ar Plasma

Kaede Katsuno, Takayoshi Tsutsumi, Kenji Ishikawa, Keigo Takeda, Hiros ...

Session ID: 20p-B11-10
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1825

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Plasma-Bullet Propagation Through a Glass Plate

Tatsuru Shirafuji, Jun-Seok Oh, Ryo Matoba, Yuki Hamamoto, Ryo Sugama, ...

Session ID: 20p-B11-11
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1826

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Comparison of radical densities in helium and nitrogen plasma jets for suppression of potato sprout

Katsunori Ueno, Shusuke Nishiyama, Koichi Sasaki

Session ID: 20p-B11-12
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1827

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Development of neutral beam etching equipment for realizing mask-less defect-free fabrication

Yoshiyuki Nozawa, Liao Bryan, Ryosuke Fujii, Toshihiro Hayami, Daisuke ...

Session ID: 18a-C309-1
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1828

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Development of bio-template arrangement equipment for realizing mask-less defect-free fabrication

MIKIO KADOI, MASAHISA ISHIDA, MAMI TANAKA, MASAHIRO SOTA, DAISUKE OHOR ...

Session ID: 18a-C309-2
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1829

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Cyclic Etching of Cobalt via Oxide and Organometallic Complex

Sumiko Fujisaki, Yoshihide Yamaguchi, Hiroyuki Kobayashi, Kazunori Shi ...

Session ID: 18a-C309-3
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1830

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Thermal etching reactions of acetylacetone with transition metals

Tomoko Ito, Kazuhiro Karahashi, Satoshi Hamaguchi

Session ID: 18a-C309-4
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1831

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Cyclic etching of tin-doped indium oxide using hydrogen-induced modified layer

Akiko Hirata, Masanaga Fukasawa, Kazunori Nagahata, Hu Li, Kazuhiro Ka ...

Session ID: 18a-C309-5
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1832

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Potential structure analysis of a capillary plate in a dual frequency CCP

Makato Moriyama, Akihiro Mitsuya, Naoya Nakahara, Haruka Suzuki, Hirot ...

Session ID: 18a-C309-6
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1833

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Surface modification of Y₂O₃ by F⁺ ion irradiation

Hojun Kang, Tomoko Ito, Junghwan Um, Hikaru Kokura, Taekyun Kang, Sung ...

Session ID: 18a-C309-7
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1834

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Identification of Gas-chemistry-dependent “Effective” Polarity of Plasma-damaged Layer in Si Substrates

Takashi Hamano, Keiichiro Urabe, Koji Eriguchi

Session ID: 18a-C309-8
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1835

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Observation of Li diffusion in Si crystal by first-principles accelerated molecular dynamics simulation

Masahiro Yamamoto, Akio Ishii, Shuhei Shinzato, Shigenobu Ogata

Session ID: 18a-C309-9
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1836

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Electronic properties and dissociation channels of CH₃F

Toshio Hayashi, Kenji Ishikawa, Makoto Sekine, Masaru Hori

Session ID: 18a-C309-10
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1837

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Examination of atmospheric plasma treatment conditions for bonding strength improvement of dental materials

Yuri Abe, Yuma Suenaga, Tomohiro Hoshino, Yoshiki Matsudate, Takehiko ...

Session ID: 18p-C309-1
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1838

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Effect of H₂-N₂ plasma exposure on micro/nanostructured titanium

Zhongqiu Lin, He Wang, Naoki Aoyama, Toshiaki Suzuki, Masaaki Niwa, Mi ...

Session ID: 18p-C309-2
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1839

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Development of high-speed removal technology for surface coating on long objects by MVP method using thermionic emission filament

Masaya Furuta, Kosaka Hiroyuki, Tatsuya Furuki, Yamakawa Kouji

Session ID: 18p-C309-3
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1840

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Comparison between characteristics of twin-cathode and twin-anode torches

Kota Kawano, Hideki Sasaoka, Muneo Furuse, Satoshi Sakiyama

Session ID: 18p-C309-4
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1841

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Pressure dependence of polycrystalline diamond film deposition using time-series exposure of modulated and non-modulated Ar/CH₄/H₂ induction thermal plasmas.

Kazufumi Hata, Kano Naoki, Nakano Yusuke, Tanaka Yasunori, Uesugi Yosh ...

Session ID: 18p-C309-5
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1842

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Direct observation of phase transformation and transient reflectivity of amorphous silicon film during micro-thermal plasma jet irradiation

Nguyen ThiKhanh Hoa, Yuri Mizukawa, Hiroaki Hanafusa, Seichiiro Higash ...

Session ID: 18p-C309-6
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1843

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Fabrication and Refractive Index Control of SiO₂ by programmable RAS

Yasuhito Tanaka, Delgado-Fuentes Gabriel, Shinichiro Saisho, Hideo Iss ...

Session ID: 18p-C309-7
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1844

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Negative plasma potential in Mg-CF₄ direct current reactive sputtering discharge

Eiji Kusano

Session ID: 18p-C309-8
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1845

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Resistivity and crystallinity of transparent conductive films sputtering used MgO and C targets with varing deposition temperature

Takuya Miyazawa, Yuta Ochiai, Hiroyuki Suzuki, Wataru Hoshino, Miki Go ...

Session ID: 18p-C309-9
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1846

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Comparison of Ag thin films deposited in different Kr gas pressures

Ryosuke Sagara, Midori Kawamura, Takayuki Kiba, Yosio Abe, Kyung Ho Ki ...

Session ID: 18p-C309-10
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1847

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The behavior of ions in TiN sputtering plasma using high power impulse magnetron sputtering

Masayuki Nakamura, Keigo Takeda, Takayuki Ohta

Session ID: 18p-C309-11
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1848

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Low-temperature Formation of High-Mobility IGZO Thin Film Transistors using Reactive Plasma Processes

Yuichi Setsuhara, Kosuke Takenaka, Hiroyuki Hirayama, Masashi Endo, Gi ...

Session ID: 18p-C309-12
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1849

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Nanoparticle formation on ZnO thin film by laser effect during RF sputtering

Wataru Wakaki, Akio Sanpei, Noriyuki Hasuike, Susumu Kamoi, Haruhiko H ...

Session ID: 18p-C309-13
Published: September 04, 2019
Released on J-STAGE: July 22, 2022

DOIhttps://doi.org/10.11470/jsapmeeting.2019.2.0_1850

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