Gaseous C
2 hydrocarbons, which would be the major impurities after methane in plasma exhaust gases, were analyzed by laser Raman spectrometry. Deuterated C
2 hydrocarbons, which were prepared by mixing acetylene, ethylene or ethane with D
2 gas were experimentally measured. Suitable bands for quantitative analyses can be selected as the
ν2 vibrations at 1, 7641, 973 cm
-1,
ν2 vibrations at 1, 5181, 627 cm-1 and some
ν3 vibrations at 9851, 344cm
-1, and
ν3 vibrations at 842994 cm
-1, for deuterated acetylenes, ethylenes and ethanes respectively. Those bands are based on the CC stretching vibrations, except for the deformation vibration
ν3 of the ethylenes. Isotopic C
2 hydrocarbons in fusion fuel gas processing will be analyzed by using the same bands in laser Raman spectroscopy.
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