Vacuum and Surface Science
Online ISSN : 2433-5843
Print ISSN : 2433-5835
Volume 66, Issue 8
Special Feature : Transactions of the Annual Meeting on the Japan Society of Vacuum and Surface Science 2022[II]
Displaying 1-17 of 17 articles from this issue
Preface
Special Feature : Transactions of the Annual Meeting on the Japan Society of Vacuum and Surface Science 2022[II]
  • Atsuya KUWADA, Tatsuya NAKAI, Yuto OOISHI, Ryo SASAMOTO, Masanori SHIN ...
    Article type: Regular article
    2023 Volume 66 Issue 8 Pages 442-447
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    Film deposition process during helium-added acetylene plasma is investigated with multiple-internal-reflection infrared absorption spectroscopy (MIR-IRAS). The sp2-C, the sp-C, the sp3-CH, -CH2, and the sp-CH components are formed in the deposited film. We found that the films are deposited through the addition reaction during the plasma. We also suggest that the amounts of the sp3-CH, -CH2 components are etched during He-added acetylene plasma.

    Download PDF (1234K)
  • Ryo SASAMOTO, Masahiro HANAI, Masanori SHINOHARA
    Article type: Regular article
    2023 Volume 66 Issue 8 Pages 448-454
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    Plasmas or discharge are often generated using noble gases and applied to various fields such as surface treatments of materials and biological fields. The behavior of electrons and ions (swarm parameters) help to understand the plasmas and discharges. Swarm parameters are often acquired at low pressure. Recently, plasmas generated at atmospheric pressure have applied in many fields. To acquire the swarm parameters at atmospheric pressure, this paper proposes new measurement method for electron drift velocity and effective ionization rate coefficient. First, these parameters are acquired in nitrogen gas at atmospheric pressure. Second, they are acquired in mixed gas (synthetic air was mixed with argon gas). These results are compared with the results of BOLSIG+ simulation. We conclude that the new measurement method is useful in gases without negative ions ; even in gases with negative ions of oxygen, this method are valid at reduced electric field E/N ≦ 31.6×10-21 Vm2.

    Download PDF (3463K)
  • Akira CHIKAMATSU
    Article type: Current Topics
    2023 Volume 66 Issue 8 Pages 455-460
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    Layered oxyfluoride single-crystalline thin films of Sr2RuO3F2, Ca2RuO2.5F2, and Sr2IrO2.5F3 were fabricated via topochemical fluorination. All the fluorinated films exhibited an insulating behavior and a largely expanded c-axis than the precursors. Sr2RuO3F2 film was a Mott insulator with Ru4+ states and had two inequivalent F sites in the SrO layers. In contrast, Ca2RuO2.5F2 film had the Ru3+ state and only one F site in the CaO rock-salt blocks. This discrepancy is probably due to the larger lattice distortion in the Ca2RuO4 precursor. The conduction mechanism of Ca2RuO2.5F2 film was described by two-dimensional variable range hopping. The effective total angular momentum Jeff=3/2 of Sr2IrO2.5F3 film was stabilized upon fluorination owing to the large electronegativity of fluorine. The conduction mechanism of Sr2IrO2.5F3 film was described by Efros-Shklovskii variable-range hopping. These results will be useful for modifying electronic states by anion doping to explore unprecedented electronic properties in layered oxides.

    Download PDF (4208K)
  • Koichiro IENAGA, Sunghun KIM, Toshio MIYAMACHI, Fumio KOMORI
    Article type: Current Topics
    2023 Volume 66 Issue 8 Pages 461-466
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    We study the atomic and electronic structures of the monolayer Kondo lattice CePt2/Pt(111) using scanning tunneling microscopy/spectroscopy (STM/STS). A monolayer (2×2)-CePt2 is formed by depositing Ce atoms on Pt(111) and annealing at 720 K. Atomically resolved STM images reveal that the monolayer (2×2)-CePt2 is protected by a chemically inert topmost Pt4 layer. The quasiparticle interference (QPI) measured on the (2×2) structure indicates a Shockley-type surface state similar to that on Pt(111) with a downward shift due to charge transfer from the underneath CePt2 layer. We discuss a possible two-dimensional coherent Kondo effect (heavy fermion) with the observed STS spectra.

    Download PDF (3963K)
  • Kenta YOKOTA, Shunsuke INAGAKI, Emi MINAMITANI, Kazuyuki SAKAMOTO, Tak ...
    Article type: Current Topics
    2023 Volume 66 Issue 8 Pages 467-472
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    The superconducting properties of atomic layers are strongly affected by the presence of surfaces and interfaces. In this study, we aim to elucidate the mechanism by which the superconducting transition temperature Tc is modulated by the adsorption of organic molecules. We have performed a comprehensive study on the atomic layer superconductor Si(111)-(√7×√3)-In with adsorption of ZnPc molecules using electron transport measurements, angle-resolved photoemission spectroscopy, and ab initio calculations. Through comparison with previous studies, the results show that the observed Tc increase cannot be attributed to the charge transfer from molecules as previously thought. We propose a new mechanism based on the push-back effect caused by molecule adsorption.

    Download PDF (2446K)
  • Akihito IMANISHI
    Article type: Current Topics
    2023 Volume 66 Issue 8 Pages 473-477
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    The electrode potential dependence of the behavior of ionic liquid molecules (BMI-TFSA) at the Au electrode interface with dimpled surface structure in ionic liquids was investigated using AC electrochemical impedance and electrochemical ATR-IR methods. Comparing the positive and negative going scans, large hysteresis was observed in the electric double-layer capacitance and the behavior of TFSA molecules. Although similar hysteresis was observed at the flat gold electrode, it was largely enhanced at the dimpled electrode. From these results, it is inferred that a large potential barrier is formed in the dimples, which inhibits the desorption of TFSA.

    Download PDF (1108K)
  • Hirofumi YANAGISAWA
    Article type: Current Topics
    2023 Volume 66 Issue 8 Pages 478-483
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    In this article, we provide an overview of our recent study on light-induced electron emission from single fullerene molecules and subnanometric optical control of their electron emission sites. After depositing molecules on a sharp metallic needle and applying strong electric fields at the apex of the needle, single-molecule protrusions appear on the apex. The electric fields are further enhanced at the protrusions and the enhanced fields drive electron emissions from the single molecules. Single-molecule electron sources can thereby be created. By irradiating such electron sources with light, we observed large modulations in the electron emission patterns. Our simulations revealed that the emission patterns represent molecular orbitals in a single molecule, a mystery scientists have been trying to get to the bottom of for the past 70 years. Our simulations also explain that light-induced modulation is driven by changes in the molecular orbitals that the emitted electrons pass through. In effect, we realize that there are subnanometric modulations in electron emission sites.

    Editor's pick

    Download PDF (7925K)
  • Hideo ISSHIKI, Ghent NAKAMURA, Yasuhito TANAKA, Shinichiro SAISHO
    Article type: Current Topics
    2023 Volume 66 Issue 8 Pages 484-489
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    The formation of functional metal oxide crystals is widely required in CMOS backend processes. Recently, digitally processed DC sputtering (DPDS) was developed as an alternative layer-by-layer process to pulsed-laser deposition (PLD) for device development. DPDS enables the alternating process of depositing ultra-thin layers of metals and oxidizing them by using pulses of reactive gases that are partially synchronized with the sputtering of specific metals. However, it was found that crystallites were formed inhomogeneously due to damage by oxygen radicals, and there was room for improvement in crystallinity. Therefore, pulsed non-radical oxidation (NRO) was introduced into DPDS to avoid radical damage. We therefore designed a DPDS sequence using dual-cathode sputtering and gas pulses synchronized with sputtering interruptions. The sufficient oxidation for the metal few layers using NRO was confirmed. We also demonstrated the space group control of monoclinic (Er0.1Y0.9)2SiO5 and the reduction of oxygen vacancies, due to DPDS-NRO.

    Download PDF (2749K)
Regular article
  • Kazuki DENPOH
    Article type: Regular article
    2023 Volume 66 Issue 8 Pages 490-495
    Published: August 10, 2023
    Released on J-STAGE: August 10, 2023
    JOURNAL RESTRICTED ACCESS

    In this paper, I propose a new model named virtual solid cell (VSC) to treat porous media more simply in the Direct Simulation Monte Carlo method. The conventional random solid cell (RSC) model represents porous media by randomly arranging solid cells in a fluid domain. In contrast, the VSC model basically treats porous media as a fluid domain, but it produces the same effect as the RSC model by imposing a stochastic limit corresponding to the porosity on the inter-cell transfer of molecules. Due to its advantage as a stochastic method, the VSC model enables one-dimensional simulation of rarefied gas flow passing through porous media, contributing to a significant reduction in computation time. It also facilitates the treatment of complex porous media with various porosities. Furthermore, the VSC model shows its potential as a new boundary model to describe surface roughness and conditions.

    Download PDF (3612K)
Science Café
Award winner
Diversity Promotion
News & Trends
Memorial
feedback
Top