日本応用磁気学会誌

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Multilayered films consisting of alternately deposited 200-nm-thick Nd-Fe-B or Nd-(Fe, Co)-B and 10-nm-thick Ta layers were prepared by magnetron sputtering on heated glass substrates. The periodically allocated Ta layers reduced and regularized the size of the Nd₂Fe₁₄B grains evolved in the films. It was also proved that the Ta layers enhanced the alignment of the Nd₂Fe₁₄B grains with their c-axes pointing in a direction normal to the film plane. The addition of Co to the Nd-Fe-B films decreased the optimum temperature to which the substrate should be heated during the deposition, and suppressed the local variation in the grain size of Nd₂Fe₁₄B, even in films with a total thickness of about 10 μm. In spite of the strong demagnetization effect in the direction normal to the film plane, permanent magnetic properties of J_r = 1.30 T, H_cJ = 927 kA, and (BH)_max = 319 kJ/m³ were obtained for [Nd-Fe-B (200 nm)/Ta (10 nm)]₅ film, and J_r = 1.24 T, H_cJ = 1210 kA, and (BH)_max = 279 kJ/m³ for a [Nd-(Fe, Co)-B (200 nm)/Ta (10 nm)]₅₀ film.

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