Journal of Surface Analysis

Papers

Quantitative Evaluation of Electron Irradiation Damage on SiO₂/Si with AES

Takashi Kimura, Shigeo Tanuma, Masahiko Inoue, Mineharu Suzuki, Tetsu ...

Article type: Others
Subject area: Others
2002 Volume 9 Issue 1 Pages 75-80
Published: 2002
Released on J-STAGE: May 30, 2003

DOIhttps://doi.org/10.1384/jsa.9.75

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The scanning Auger microprobe is widely used for the analysis of sub-micron region of industrial products. The electron irradiation damage on silicon dioxide is usually estimated from the slightly changes of the peak shapes qualitatively. It is, then, very important to determine the electron irradiation damage on silicon dioxide quantitatively. We proposed a simple measurement method to determine the decomposition cross section of SiO₂/Si sample due to electron irradiation from intensity measurement of SiLVV peak. The critical electron dose for SiO₂ can be calculated from values of the SiO₂ decomposition cross section and that of Si.

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Development of Unique Specimen Holder for LEED-AES Study at High Temperatures

S. Iida, T. Tsujita, T. Nagatomi, Y. Takai

Article type: Others
Subject area: Others
2002 Volume 9 Issue 1 Pages 81-87
Published: 2002
Released on J-STAGE: May 30, 2003

DOIhttps://doi.org/10.1384/jsa.9.81

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A unique specimen holder for LEED (low energy electron diffraction) and AES (Auger electron spectroscopy) study at high temperatures has been developed with considerable success. It enables us to observe the LEED pattern of a clean W(100) surface with enough contrast using a commercial-type LEED system at 1400 K. AES spectrum for the W(100) surface at 1400 K has been successfully measured without any effects caused by the heating of the specimen. The present result leads us to the confirmation that the developed specimen holder is well worthy to be applied to the systematic study of the Sc-O/W(100) system at high temperatures.

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Enhanced surface sensitivity in TOF-SIMS under well optimized Low Primary Beam Energy

T. Hoshi, M. Tozu, M. Kudo

Article type: Others
Subject area: Others
2002 Volume 9 Issue 1 Pages 88-98
Published: 2002
Released on J-STAGE: May 30, 2003

DOIhttps://doi.org/10.1384/jsa.9.88

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We optimized the instrumental parameters for lower primary beam energy bombarding conditions. The achieved mass resolution at 2∼12keV primary beam energy ware M/ΔM=5000–10000. Using these conditions, we measured systematically the secondary ion intensities and interpreted them in relation to the escape depth of the secondary ions as well as the structure of the samples. It was found that the secondary emissions from uppermost layer at 2keV primary beam energy are enhanced 20 times more than those obtained by 12keV primary beam energy.

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Possibilities of TOF-SIMS Approach for Biometrics

Miyako Tozu, Takahiro Hoshi, Masahiro Kudo

Article type: Others
Subject area: Others
2002 Volume 9 Issue 1 Pages 99-108
Published: 2002
Released on J-STAGE: May 30, 2003

DOIhttps://doi.org/10.1384/jsa.9.99

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Materials used in biomedical or cosmetic application often functioned by it’s surface properties. Thus, understanding surface is critical to the design and engineering of new devices. Modern TOF-SIMS has been developed for the microelectronics and petrochemicals industry. This paper examines how TOF-SIMS can be applied to biomaterials, such as hair surface. In particular, surface redial organic on hair and penetration depth into cuticles or cortex of shampooing/rinsing component will be addressed.

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