プラズマを用いた微細加工や成膜などのプラズマプロセスにおけるプラズマの基礎的な事項（プラズマの性質と基礎量，プラズマ中の素過程，荷電粒子の消滅過程，イオンシースの形成と性質，主なプラズマの生成原理と基本的な特性および電子温度の制御法など）について解説した．

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 本講座は化学気相成長（CVD）法の基礎に関して解説する．欠陥の少ない結晶成長や良好な被覆特性など，CVD 法を使用すると他の成膜方法では実現できない特長を得ることができる．実際にこの特長を得るためには，化学反応過程を解析し所定のプロセス条件で実施することが必要となる．本講座では CVD の定義から，この反応解析の手法と各プロセスの詳細に関して解説する．

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 In this article, potential dangers of vacuum technologies are revealed, and safety measures for these dangers have been suggested. These dangers include considerable difference between the vessels' inner and outer pressures, condensation of flammable gases to the pump, electric shock due to a high voltage or electric leakage, involution to mechanical motion, touching of a high temperature during baking. Furthermore, many dangers exist when the system is under repair or maintenance. In addition to the vacuum system itself, the materials used for its operation such as liquid cryogen and organic solvents are more hazardous. Finally, some of the safety measures are proposed for the aforementioned dangers.

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 We have developed a compact sample transfer vessel with a battery-driven ion pump. The size of the vessel is about 67 cm in length, and 7.8 kg in weight. The ion pump can operate for more than 30 hours with 16 commercial AA batteries. The lowest vacuum pressure achieved by this device was ∼10⁻⁶ Pa. It is improved by two orders of magnitude, compared to the previous device. We examined the performance of this device by observing adsorbed oxygen species on a cobalt metal plate with x-ray photoelectron spectroscopy. We found that the cobalt metal plate kept in this new device adsorbed about 1/20 as much oxygen as the same plate exposed to the air.

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