A Clark-type electrochemical(EC) chlorine gas sensor has been used for a leakage-gas detector. The EC sensor, which has a PTFE porous filter as a gas permeable membrane, shows excellent performance in terms of rapid response, sensitivity, reproducibility and long-term stability. However, the size of the conventional EC sensor is as large as several centimeters. We have fabricated a micro Clark-type EC chlorine sensor using micromachining. Pyrex glass used as a sensor body was processed using a dicing-saw. Pt/Ti thin membranes adhered to the glass by means of ECR-sputtering are used as a working electrode and a counter electrode. Porous silicon of 160μm in thickness, which had systematic φ30μm micro-pores with a pitch of 100μm, by means of the DeepRIE, was used as a gas-permeable membrane. It was stored in the vapor of 1, 1, 1, 3, 3, 3-hexamethyldisilazane to obtain a water-repellent surface for 24 hours, and adhered to the sensor body using a silicone adhesive. The size of sensor body was 5×5×3mm. A MBr(M: alkaline metal) solution as an electrolyte was injected to the sensor body adhered on a TO-8 package. The linear calibration curve and correlation factor in the concentrating range from 0 to 0.5ppmCl
2 was I=−16.886C−1.195(nA) and 0.998, respectively. The lower detection limit was 0.1ppm. The 50% response time and the 90% recovery time were within 10s. and several minutes, respectively. The reproducibility for 2ppm was the deviation of the sensor signals within ±1nA. This miniaturized EC chlorine sensor showed good performances.
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