It was confirmed for various compounds that the energy difference between the K
β1, 3 line and the K
β', line from Al, Si, P, S and Cl was dependent on the kind of atoms (C, N, O or F) in the nearest neighbor. The K
β1, 3 lines from these elements were considered to be due to the transition of an electron from the 3
p(X-ray emitting atom)-2
p(ligand atom) valence band levels to the 1
s vacancy (X-ray emitting atom), and the K
β' from the 2
s (ligand atom) levels to the 1
s vacancy (X-ray emitting atom), respectively. Consequently, the energy difference between K
β1, 3 and K
β' was expected to be nearly equal to the energy difference between the 2
p and the 2
s levels of ligand atoms. The observed results were consistent with the consideration described above. In addition, the results of the molecular orbital calculation for SO
42-and ClO
4- showed a similar tendency. Therefore, it was concluded that a chemical state of Al, Si, P, S or Cl,
i.
e., the kind of the nearest atoms, can be determined by measuring the separation between K
β1, 3 and K
β' Chemical state analysis of Al in the AlN-H
3PO
4polymer was carried out using the phenomenon described above. A mixture of A1N and H
3PO
4 formed a kind of an inorganic polymer at 100200°C. Although the X-ray diffraction pattern of AlN disappeared, chemical analysis showed that nitrogen was kept in the polymer. The AlK
β spectrum from the polymer was found to be quite similar to that from crystalline AlN. Therefore, the conclusion was derived that no change existed in the nearest atoms of Al in the polymer. The change in AlK
α due to the coordination was also investigated and the coordination number of Al was found to remain unchanged. Instrumental conditions are given in the following. Samples were excited by X-rays from a Cr target tube. The spectrometer used was a commercially available unit (Toshiba AFV 104) equipped with EDDT (Al, Si) or Ge (111) (P, S, Cl) analyzer crystal. Spectra were recorded with a rate meter. K
β1, 3-K
β' separations were obtained graphically. The separations ranged from 3 to 18 eV and the reproducibility was about 0.3 eV.
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