Using high resolution inductively coupled plasma mass spectrometry (HR-ICP-MS), trace impurities in high-purity zirconium oxide powder samples were determined. A 0.5 g zirconium oxide sample was dissolved with 5 ml of sulfuric acid (1+1) in a PTFE pressure vessel at 230°C for 40 h. Most of the spectral interferences were avoided by using a high-resolution spectrometer. The matrix effects of Zr were investigated. Since the matrix effects of a high Zr concentration on the peaks of the internal standard were similar to those on almost all of the analyte elements, except for Hf, the internal-standard method was employed for quantitative analysis. Indium was used for the internal standard element. The analytical values, except for Hf obtained by the internal-standard method, approximately agreed with those obtained by the standard addition method. The analytical values of the Hf obtained by ICP-AES approximately agreed with those obtained by the standard addition method. The detection limits in the solid samples were in the range of 0.01∼9 μg g
−1. The determinations for Na, Mg, Al, Ca, Ti, V, Cr, Mn, Fe, Ni, Sr, Cs, La, Ce, Hf, Pb and Bi in three kinds of commercially available high-purity zirconium oxide powders are presented.
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