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Online ISSN : 2433-5843
Print ISSN : 2433-5835
65 巻, 2 号
SPM特集号「プローブ顕微鏡が拓く世界」
選択された号の論文の10件中1~10を表示しています
巻頭言
SPM特集号「プローブ顕微鏡が拓く世界」
論文
  • 大城 智義, 柏木 誠, 小口 有希, 石井 寛至, 野口 雄司, 重里 有三
    原稿種別: 論文
    2022 年 65 巻 2 号 p. 84-89
    発行日: 2022/02/10
    公開日: 2022/02/10
    ジャーナル 認証あり

    We successfully fabricated the high-performance transparent thin film heaters using ITO/AgPd/ITO laminated films with various thickness combinations and investigated their optical, electrical, structural and heating properties in detail. The surface temperature rise rate (TRR) from 0 to 7 seconds for the ITO (200 nm)/AgPd (10 nm)/ITO (200 nm) under the applied voltage of 6.0 V was 16℃/s, where the temperature reached over 300℃ within 20 sec. The transmittance at 550 nm of this heater was 81%, where the sheet resistance was 4.2 Ω/□. The cross-sectional HREM analyses revealed that the bottom and top ITO films showed quite different polycrystalline structures after the temperature rising tests, which can be explained by the solid-phase and vapor-phase crystallizations, respectively.

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