We developed an improved method for observing a clear magnetic contrast images using a commercially available scanning electron microscope (SEM). To obtain SEM images with a clear magnetic contrast using a type-I method, which utilizes changes in the number of detected signals of secondary electrons (SEs) deflected by a stray magnetic field of specimens, directional-selective detection of SEs is needed. By combining beam deceleration and tilting specimen, condition of directional-selective detection for SEs was achieved, resulting in improving the type-I magnetic contrast. The tilting deceleration condition was highly-sensitive to fine magnetic domain structures, and it was shown that fine magnetic domain structures can be visualized in perpendicular magnetization region of Nd-Fe-B alloy specimens. Furthermore, by combining two directional-selective SEM images in two orthogonal directions, magnetic contrast images without anisotropy comparable to those obtained by a Kerr microscopy and a Spin-SEM were obtained.
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