ByapplyingacertainforcedirectlytoaresistpatternwiththeAFM(atomicforcemicroscope)tipinthescanningprocedure,thecolumnshaperesistpatternof177nmdiametercouldbepeeledeasily.ThepeelingstrengthoftheresistpatternincreasedwithmovingspeedoftheAFMtip.TheinfluenceoffrictionbehaviorbetweenAFMtipandresistpatternonpeelingstrengthwasdiscussed

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Itwasknownthatthepolyethylenethinfilmwasdepositedonsubstratebyplasmatreatmentwiththeethylenegasasamonomer.Itwasveryimportantforcontrolofthestructureandthepropertyofplasmadepositedfilmsfromvariousorganicmonomerstoclarifyplasmareactionwiththeethylene.Thisstudywasinvestigatedoncharacterizationoftheethyleneplasmadepositedfilmandtheinfluenceofmixedgases.Theplasmadepositedfilmandtheoilysubstancewasobtainedonaglassplatebyplasmatreatmentsinethylene-argon,-nitrogen,or-carbondioxidemixtureatatmosphericpressure.FT-IRwastakenfoi､plasmadepositedsubstancebeforeandaftermethanolsoaking.GC-MSwastakenforplasmaproductgasesandmethanolextractivesfromplasmadepositedsubstance.Itwassuggestedthepresenceofminutequantityof-CH2-CH2-,>C=0and>C-0-groupsintheplasmadepositedsubstancefromFT-IRspectra.Anditwassuggestedthatthecarbondioxidefragment,producedbyablationingasphase,reactedwithethylene,andformedesters.carbonicacidsandalcoholsintheplasmadepositedsubstancefromGC-MSchromatograms.Affinitybetweenasubstrateandtheplasmadepositedfilmwasimprovedbyargonmixing.

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