The molybdenum disilicide is a material for very large-scale integrated circuits, and the determination of trace impurities in it is required. Graphite furnace AAS using a platform technique and ICP-AES have been investigated. The matrix element, molybdnum, was removed by cation exchange chromatography. Recoveries of over
ca. 96% were obtained for Al, Be, Bi, Ca, Cd, Co, Cu, Fe, In, K, Mg, Mn, Na, Ni, Tl and Zn using a 0.05 M H
2SO
4 sample solution, while in the case of Ga, Ti and Sn, it was necessary to adjust the sample solution to 0.1 M H
2SO
4. The analytical range of contents was from 0.0 n ppm to 0.0
n %. The analytical procedure was as follows; 1.00 g of a sample was dissolved with HF-HNO
3, 1.1 ml of H
2SO
4 (1+1) was added and the solution was heated until fuming appeared. After cooling, it was diluted to 200 ml (0.05 M in H
2SO
4). The solution was passed through a cation exchange column (Dowex 50-X4, 100200 mesh, 9 mm i.d., 13 ml) and the column was washed with 100 ml of 0.01 M HNO
3-0.15% H
2O
2. The analytes were eluted with 90 ml of 2 M HNO
3. The eluate was diluted to 100 ml and a 20 μl aliquot was injected into a graphite furnace. Residual solution was used for measurement by ICP-AES.
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