The Journal of the Institute of Electrical Installation Engineers of Japan
Online ISSN : 2188-6946
Print ISSN : 0910-0350
ISSN-L : 0910-0350
Volume 34 , Issue 3
Showing 1-18 articles out of 18 articles from the selected issue
  • Noriyuki Kushiro, Shodai Matsuda, Kunio Takahara
    2014 Volume 34 Issue 3 Pages 209-214
    Published: 2014
    Released: September 04, 2014
    In this paper,an acoustic diagnosis method for vacuum pump is described. There is an essential requirement that the vacuum pumps equipped in a semiconductor plant,should keep running twenty-four seven without troubles. A periodical maintenance,where the worm seals of the pump are exchanged for new ones,is a popular method to satisfy the requiremen. However,abrasion speed of the pump has huge differences among individuals. More sophisticated diagnosis method should be replaced for the periodical maintenance to optimize the period of the maintenance and reduce the maintenance cost. The acoustic diagnosis method for seals' abrasion has been developed to utilize sound of refrigerant leakage of the pump as an indirect index of seals' abrasion. A prototype of diagnosis tool has been implemented and evaluated both in a laboratory and in a semiconductor factory over six months. Capability for a field diagnosis tool is confirmed through the field tests.
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