A measuring technique of the spectral sensitivity of a detector is described with detailed analyses. This technique consists of the following two steps: The first one is the accurate measurement of the relative spectral transmittance of a double prism monochromator. The second one is the determination of spectral sensitivity with the combination of the monochromator with the known spectral transmittance and the calibrated standard radiance lamp.
The following contents are included;
1. The estimation is made about the effect of the optical path difference between the above two measuring steps when two additive dispersion monochromator are used. This effect can be made negligibly small by selecting proper aperture size.
2. An improved method to approximate the accurate dispersion curve and the effective band width is described. This method can exclude the errors which may be the amount of about 5% in measuring the relative spectral sensitivity.
3. An equation is given to correct the errors in the spectral sensitivity measurement caused by the finite slit width.

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A method of evaluating effective irradiance is investigated for photoresist with the reciprocity law failure property irradiated by fluctuating radiation. As a result, a formula for evaluating effective irradiance is derived. The results of this formula suggest that both reciprocity law failure and time response of photochemical reaction should be considered when evaluating effective irradiance in the above case.
This method is used in an irradiance meter which automatically measures the distribution of near ultraviolet irradiance. This irradiance meter is applied to the photoresist exposure process of color TV picture tube making. The automatic irradiance meter can measure the relative irradiance over 51 points on the phosphor screen of a color TV picture tube in about 1 min. The reproducibility and accuracy of measured values are estimated at about 0.2% and 1% respectively. Absolute irradiance is measured at the center of the screen with an accuracy of about 3%.

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