The linear thermal expansion coefficients (LTEC) of silica glasses produced by the Nippon Glass lnc. Ltd. have been measured in the temperature range 0 ∼50°C using an interferometric dilatometer. The measurement system consists of a double-path optical heterodyne interferometer and a compact vaccum thermal bath controlled by a thermoelectric transducer. Before measuring the silica glass specimens, the reliability checks of the dilatometer were perfomed on silicon and fused silica SRM 739. The resultant estimated maximum uncertainty of the measured LTECs is about±2×10
-8K
-1. The measurement results indicated that, around room temperature (0∼50°C), only a factor of CI-rich content in silica glass affects the thermal expansion characteristics of the silica glass reducing slightly its absolute values, nevertheless the differences in the LTECs for all of the investigated specimens are sufficiently small within 4×10
-8K
-1
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