In this paper we discuss the basic characteristics and performance of precision washing using ER water (electrolyzed reducing water) electrolyzed with Na
2SO
4 solution (Na
2SO
4 ER water). First, the structure and characteristics of the three-tank system used to produce electrolyzed water as well as how Na
2SO
4 ER water is produced by the system are described. Next, the relationship between the characteristic value of Na
2SO
4 ER water and the electrolytic current, and its difference from those for NaCl ER water and NaOH solution are investigated experimentally. Changes in the characteristic value of Na
2SO
4 ER water with time are also investigated in the same time. Finally, according to the results of washing the surface of precision parts with Na
2SO
4 ER water, C
9H
12 solution and pure water, the washing efficiency of Na
2SO
4 ER water is verified.
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